Vacuum reflow ovenMK5 Series

Continuous-conveyor vacuum reflow for void-free needs.

  • Void rate <1%
  • N₂ −50% / 10 ppm
  • No temperature drop
  • Spatter control

Heller Industries forced-convection vacuum reflow. A peak-zone vacuum module achieves void rates under 1% on many parts (up to 99% removal). N₂ use is about 50% lower than conventional, with low oxygen. Built for high-reliability assembly such as ADAS, SiC/GaN power devices, power modules, and LED headlights.

Vacuum reflow oven MK5 Series

Overview

For high-reliability assembly

ADAS, power devices, LED headlights

As interconnects shrink, joint area shrinks and void-rate criteria rise for power semiconductors.

With high-temperature solders also spreading, void control is essential for thermal diffusion and vibration resistance at the joint.

Effective for bare die and solid underfills on insulating substrates, power modules, SMT boards, and electronic modules.

ADAS / autonomous-driving boards
SiC / GaN power devices
LED headlight boards

Void removal process

Void rate under 1% on many parts; up to 99% removal

In conventional reflow, gas generated during melt remains until the joint solidifies.

Vacuum reflow preheats in N₂, then reduces pressure while solder is liquid at peak temperature to release bubbles.

Supports both paste and preform solder.

Void removal flow with vacuum reflow
Bubbles trapped during heating are released when pressure is lowered.

X-ray comparison

Without vacuum / with vacuum

X-ray shows solder voids left by conventional reflow are largely removed with vacuum reflow.

Joint quality and reliability change dramatically.

X-ray comparison of conventional vs. vacuum reflow
Left: conventional reflow. Right: vacuum reflow.
X-ray comparison of QFP joints
QFP center pad—solder voids are nearly eliminated with vacuum reflow.
X-ray comparison of component joints
Solder voids under components are likewise removed.
X-ray comparison of power-module joints
Under solid pours and module joints, voids drop sharply.

Continuous transport without temperature drop

Uniform forced convection + in-line vacuum

Unlike batch vacuum ovens, boards move continuously from convection zones into the peak-temperature vacuum chamber.

No step-transfer temperature drop—profiles stay smooth.

Even heat sinks with fins or pins keep in-board temperature distribution. Choose roughly 10–16 zones to match workpiece size and thermal mass.

Preheat, vacuum main heat, and cooling zone layout
From left: convection preheat, vacuum main heat, convection cooling.

Proprietary heated vacuum chamber

Load → pump-down → main heat → vent → unload

The vacuum module sits in the solder-melt zone. Chamber IR heaters reach peak temperature and can shorten time above liquidus.

Holding high temperature also limits flux residue in the chamber.

Conveyor options: chain belt or edge hold. Mounter-process carriers can be loaded as-is.

Heated vacuum module and conveyor structure
Center: heated vacuum module integrating door motion and conveyor.

Temperature profile

Vacuum at peak temperature

Tent, soak, and other profiles can be set freely.

Vacuum runs in the peak zone; pump-down rate, hold pressure, IR settings, and cycle time are tuned to the workpiece.

Temperature profile showing the vacuum interval
Orange frame marks the vacuum interval while solder is molten.
Example vacuum-zone settings
Example pump-down rate, hold, IR settings, and cycle time.

Multi-stage pressure reduction to limit spatter

Closed-loop vacuum pump control

Pressure reduction and refill are controlled in multiple steps—limiting solder and flux spatter common with single-step pull-down.

A staging conveyor shortens chamber transfer time; dual rails raise UPH. Low conveyor vibration helps prevent part shift while boards move in the oven.

Multi-stage vacuum pump-down and return to atmosphere
Stepwise pump-down from atmosphere, hold, then return to atmosphere.

Spatter examples

Sudden single-step vacuum makes solder spatter and solder balls more likely. Multi-stage control suppresses this.

Example of solder spatter
Example of solder balls

High-efficiency flux recovery

Equipped with a high-efficiency flux recovery unit proven in the field

High-efficiency flux recovery unit
Flux recovery pot

N₂ atmosphere and process control

Oxygen ≤10 ppm; N₂ use ~50% lower than conventional

Closed-loop oxygen monitoring keeps the inert atmosphere stable.

ECD-linked oven Cpk reporting is standard—real-time process Cpk with no added cost.

Lineup

1800 / 1900 / 2000 Series

Overall length and zone count are proposed to match workpiece size and thermal mass.

In-line continuous transport balances high throughput with low cost of ownership.

1800 Series

1800 Series zone layout
Overall length
4.85 m
Cooling zones
2 zones*
Chamber size
400 mm□
  • 1826MK5-VR Heating: 8 zones
  • 1809MK5-VR Heating: 9 zones

1900 Series

1900 Series heat and cool zones
Overall length
5.89 m
Cooling zones
3 zones*
Chamber size
400 mm□
  • 1936MK5-VR Heating: 10 zones
  • 1913MK5-VR Heating: 13 zones

2000 Series

2000 Series heat and cool zones
Overall length
6.78 m
Cooling zones
3 zones*
Chamber size
450 mm□
  • 2043MK5-VR Heating: 13 zones

*Lower cooling is optional.

Works well with

Reflow checker

Measure reflow temperature profiles to catch drift from set values early. Choose from slim units to modular RCX systems for your line.

Learn more
Reflow checker

Specifications

Manufacturer
Heller Industries
Series
Vacuum reflow oven MK5 (N₂ vacuum)
Heating method
Forced convection + vacuum module in peak zone
Solder type
Paste / preform
Conveyor
Chain belt / edge hold
Atmosphere
N₂
  • Bottom cooling is optional. Zone count is proposed to match the workpiece.
  • Detailed specifications vary by configuration. Please contact us.
  • Specifications and appearance are subject to change without notice for improvement.

Contact

Questions or consultation requests are welcome.

Sawa Trading Inc. — Machinery Sales

+81-6-6955-9100+81-6-6955-9101